Thursday, 29 July 2021
| 9:00 | Workshop - Seminar room 104 (building 30.25) |
| G. Goll How to clean a cleanroom | |
| 9:15 | all clean-up |
| 14:00 | Introduction : Otto-Lehmann Lecture Hall (building 30.22) |
| G. Goll Annual cleanroom introduction | |
| (mandatory for all users of the NSL cleanroom) | |
Karlsruhe, 20.07.2021 G. Goll
Wednesday, 22 July 2020
| 9:00 | Workshop - Seminar room 104 (building 30.25) |
| G. Goll How to clean a cleanroom | |
| 9:15 | all clean-up |
| 14:00 | Introduction : Otto-Lehmann Lecture Hall (building 30.22) |
| G. Goll Annual cleanroom introduction | |
| (mandatory for all users of the NSL cleanroom) | |
Karlsruhe, 19.07.2020 G. Goll
Tuesday, 23 July 2019
| 9:00 | Workshop - Seminar room 104 (building 30.25) |
| G. Goll How to clean a cleanroom | |
| 9:15 | all clean-up |
| 14:00 | Introduction : Otto-Lehmann Lecture Hall (building 30.22) |
| G. Goll Annual cleanroom introduction | |
| (mandatory for all users of the NSL cleanroom) | |
| Focused Session: Safety | |
| 15:00 | Silvia Diewald Usage of carcinogenic, mutagenic and reprotoxic materials in the cleanroom labs |
| 15:30 | NSL Users Short contributions ad discussion |
Karlsruhe, 19.07.2019 G. Goll
Thursday, 26 July 2018
| 9:00 | Workshop - Seminar room 104 (building 30.25) |
| G. Goll How to clean a cleanroom | |
| 9:15 | all clean-up |
| 14:00 | Introduction : Otto-Lehmann Lecture Hall (building 30.22) |
| G. Goll Annual cleanroom introduction | |
| (mandatory for all users of the NSL cleanroom) | |
| 15:30 | NSL Users Short contributions and discussion |
| Focused Session: 3D Lithography | |
| 16:00 | G.Goll, NSL Opening New Vistas for the 3D-Lithography Lab Nanoscribe Users |
Karlsruhe, 24.07.2018 G. Goll
Wednesday, 26 July 2017
| 9:00 | Workshop - Seminar room 104 (building 30.25) |
| G. Goll How to clean a cleanroom | |
| 9:15 | all clean-up |
| 14:00 | Introduction : Otto-Lehmann Lecture Hall (building 30.22) |
| G. Goll Annual cleanroom introduction | |
| (mandatory for all users of the NSL cleanroom) | |
| Focused Session: Optical Lithography | |
| 15:00 | A. Quintilla, NSL Deep UV lithography at the Suess MA6 mask aligner |
| 15:30 | M. Hippler, ZOO Direct Laser Writing via Two-Photon Polymerization: Applications in biology for advanced 3D cell culture |
| 15:45 | T. Siegle, APH Direct Laser Writing via Two-Photon Polymerization: Tunable whispering gallery mode cavities made from polymers |
| 16:00 | M. Weides, PHI Quantum technology with real and artificial spins |
| 16:30 | NSL Users Short contributions and discussion |
Karlsruhe, 21.07.2017 G. Goll
Thursday, 28 July 2016
| 9:00 | Workshop - Seminar room 104 (building 30.25) |
| G. Goll How to clean a cleanroom | |
| 9:30 | all clean-up |
| 14:00 | Introduction : Otto-Lehmann Lecture Hall (building 30.22) |
| G. Goll Annual cleanroom introduction | |
| (mandatory for all users of the NSL cleanroom) | |
| Focused Session: Processing at the NSL | |
| 15:00 | I. Pop, PHI Bridge Free Fabrication for Stable and Reproducible Josephson Junctions |
| 15:30 | D. Wander, NSL Investigation of the Temperature Dependency of CSAR62 Development |
| Focused Session: Focused-Ion-Beam Lithography | |
| 16:00 | P. Brenner, NSL FIB – A short introduction |
| 16:30 | S. Hettler, LEM Fabrication of electrostatic phase plates for transmission electron microscopy |
Karlsruhe, 29.06.2016 G. Goll
Friday, 24 July 2015
| 10:00 | Introduction - Otto-Lehmann Lecture Hall (building 30.22) |
| G. Goll Annual cleanroom introduction (mandatory for all users of the NSL cleanroom) | |
| 11:00 | Workshop: E-Beam Lithography - Otto-Lehmann Lecture Hall (building 30.22) |
| S. Diewald Proximity correction for e-beam exposures | |
| Discussion of user questions and demands | |
| We encourage user presentations (5-10 min), and welcome any discussions on applications, specific issue solutions, and feature needs or requirements. | |
Karlsruhe, 22.07.2015 G. Goll
Wednesday, 23 July 2014
| 14:00 | Introduction - MTI Lecture Hall (building 30.33) |
| G. Goll Annual cleanroom introduction (mandatory for all users of the NSL cleanroom) | |
| 15:15 | Workshop 1: E-Beam Lithography - Seminar Room 3-1 (building 30.23) |
| Coffee break | |
| 15:30 | S. Diewald Proximity correction for e-beam exposures |
| 15:50 | Discussion of user questions and demands |
| 15:15 | Workshop 2: Reactive Ion Etching - Seminar Room 104 (building 30.25) |
| Coffee break | |
| 15:30 | G. Goll Basic aspects of reactive ion etching |
| 15:50 | Discussion of user questions and demands |
Following the workshops, you have the opportunity for a social gathering in form of a barbecue behind the CFN building.
Karlsruhe, 22.07.2014 G. Goll
Tuesday, 23 July 2013
Otto-Lehmann Lecture Hall
| 14:00 | G.Goll | Annual cleanroom introduction (mandatory for all users of the NSL cleanroom) |
|
Focused Session: Optical Lithography at NSL |
||
| 14:45 | M. Hermatschweiler, Nanoscribe GmbH |
3D μ-Printing by Direct Laser Writing |
| 15:15 | B. Richter, ZI | Three-Dimensional microscaffolds exhibiting spatially resolved surface chemistry |
| 15:45 | N. Lindenmann, IPQ | Broadband low-loss interconnects enabled by photonic wire bonding |
| 16:15 | coffee break | |
| 16:45 | S. Meißner/J. Braumüller, PI | Optical lithography for superconducting qubits |
| 17:15 | A. Vetter, CFN | Investigation of resist systems for optimized lift-off processes |
Following the presentations, you have the opportunity for a social gathering in form of a barbecue behind the CFN building.
Karlsruhe, 09.07.2013 G. Goll
Tuesday, 24. July 2012
Otto-Lehmann Lecture Hall
| 14:00 | G. Goll, CFN | Annual introduction in the use of the cleanroom. (Mandatory for all user of the NSL cleanroom) |
Key subject: Electron-beam lithography at KIT |
||
| 14:45 | S. Diewald, CFN | Electron-beam lithography at NSL – JEOL JBX-5500ZD |
| 15:15 | H. Rotzinger, PI | Fabrication of superconducting nano-electronics |
| 15:45 | Coffee Break | |
| 16:15 | P. Jakob, IMT | Basic knowledge for new users of the ebeam, focusing on the aspect of direct write |
| 16:45 | R. Palmer, IPQ | Novel fabrication method for low loss silicon nano-wire waveguides and fibers couplers |
| 17:15 | K. Il’in, IMS | Superconducting nanowire single-photon detector: towards high efficiency in infrared spectral range |
| 17:45 | W. Pernice, INT | Integrated circuits for nano- and quantum photonics |
Following the presentations, you have the opportunity for a social gathering in form of a barbecue behind the CFN building. Please bring your own grill food, drinks will be available at cost price.
Karlsruhe, 05.07.2012
G. Goll